Ammonia (NH3)
Ammonia is used both within the silicon wafer processing arena as a source of nitrogen species for silicon nitriding and silicon oxynitriding, as well as for compound semiconductors in the light emitting diode production process as a source of nitrogen in GaN films. Impurities in ammonia for LED production is a critical matter, with all oxygen species, as well as Cr and Si being highly detrimental to the photoluminescence of the film. Also used in semiconductor processing as a source of atomic nitrogen which can be extracted from ammonia at a lower temperature than from molecular nitrogen, N2.
Threshold Limit Value (TLV) : 25ppm
Physical properties: Toxic, corrosive and flammable
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