Carbon Monoxide (CO)
Carbon Monoxide is used in a variety of applications including silicon-nitride-over-silicon etch to increase selectivity, as a source of oxygen in oxidation, and as a source of carbon in certain doping processes. Carbon Monoxide is stable with respect to decomposition.
Threshold Limit Value (TLV): 25ppm
Physical properties: Colourless, odourless, flammable and toxic
Physical Constants |
|
 |
Maximum Impurities |
|
 |
