Deuterated Silane (SiD₄)

Deuterated Silane is used in Gigabyte DRAM production as a source of silicon without hydrogen, where the hydrogen that is typically incorporated in the crystal lattice, is detrimental to the high-speed operation of the gate. The heavier deuterium within the lattice provides a “mass barrier” to the Hot Electron Effect induced damage, thus increasing device lifetime. Deuterated Silane is also used in a variety of research applications to allow determination of hydrogen thermodynamics and incorporation rates.

Threshold Limit Value (TLV): 5ppm

Physical properties: Pyrophoric, toxic

Physical Constants for SiD4

Physical Constants for SiH4

Maximum Impurities

Various cylinder sizes available.