Nitric Oxide (NO)
Usually shipped in restricted pressure, Nitric Oxide is used in diffusion processes, employing atmospheric furnace systems to grow nitrided gates oxides for gigabit processes. It is also used to grow high quality silicon oxides.
Threshold Limit Value (TLV) : 25ppm
Physical properties: Colourless, toxic, non-flammable
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Maximum Impurities |
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