Sulfur Hexafluoride (SF6)
Sulphur Hexafluoride is used as a source of fluorine or sulphur fluoride free radicals for etch processing under RF conditions, as well as a gas phase dielectric within the high power electrical and physics industries. Typical applications are for oxide etching, nitride etching, and wafer cleaning. Sulphur Hexafluoride is also used for tungsten etch, where the etch byproducts are volatile and easily transported away from the wafer surface. A higher purity Sulphur Hexafluoride results in superior process control, with less byproduct interaction and improved etch characteristics.
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